1. Personnel Changes of the offices of the subsidiary's directors held by the corporate directors (effective on July 1, 2001)

Mitsutaka Yoshida	(New)	Senior Vice President, Corporate Officer, Tokyo Electron Ltd. Corporate Director, Tokyo Electron Tohoku Ltd.
	(Now)	Senior Vice President, Corporate Officer, Tokyo Electron Ltd. Chairman, Tokyo Electron Tohoku Ltd.
Keiichiro Kuriyama	(New)	Corporate Director, Tokyo Electron Ltd. Corporate Director, Tokyo Electron Device Ltd.
	(Now)	Corporate Director, Tokyo Electron Ltd. Chairman and Representative Director, Tokyo Electron Device Ltd.
Kuniyuki Matsuba	(New)	Corporate Director, Tokyo Electron Ltd. Corporate Director, Tokyo Electron FE Ltd.
	(Now)	Corporate Director, Tokyo Electron Ltd. Chairman and Representative Director, Tokyo Electron FE Ltd.
Hiroshi Takashima	(New)	Corporate Director, Tokyo Electron Ltd. Corporate Director, Tokyo Electron Kyushu Ltd.
	(Now)	Corporate Director, Tokyo Electron Ltd. Chairman and Representative Director, Tokyo Electron Kyushu Ltd.
Junichi Inoue	(New)	Corporate Director, Tokyo Electron Ltd. Corporate Director, Tokyo Electron AT Ltd.
	(Now)	Corporate Director, Tokyo Electron Ltd. Chairman and Representative Director, Tokyo Electron AT Ltd.

Background and points of the personnel changes]
TEL has implemented globalization of its business and management according to global standards in view of shareholders interests. From the viewpoint of the corporate governance, TEL has made management programs for better transparency and objectivity, and implemented timely disclosure of its management information.

Accordingly, the board of directors has been placed as an organization to represent interests of shareholders to monitor the execution of the business and affairs, and C.S.S. has been designated as an organization to execute the business and affairs, to clearly separate the management and execution of the business. For further enhancement of the monitoring function of the board, the compensation committee and the nominating committee has been established as an internal organization of the board.

These personnel changes are to further strengthen the management of the TEL Group. Corporate directors of TEL who had served as chairman of a subsidiary will be no longer in charge of those offices of business execution. From now on, Keiichiro Kuriyama, Kuniyuki Matsuba, Hiroshi Takashima and Junichi Inoue will concentrate in activities including committee activities for strengthening the function of the board to reinforce the management of the Group as a whole from objective standpoint.
2.Personnel Changes of the subsidiary's Representative Directors (effective on July 1, 2001)