Tokyo Electron Limited, at its board meeting held on May 18, 2001, approved on the date/time, location and agenda for the 38th Fiscal Year Annual Shareholders' Meeting as follows:

1. Date/time:	Wednesday, June 27, 2001 10:00 a.m.
2. Location:	Capitol Tokyu Hotel 10-3 Nagata-cho 2-chome, Chiyoda-ku, Tokyo 100-0014, Japan
3. Agenda:

Items to be reported:

Report on the business report, the balance sheet as of March 31, 2001 and the statement of income for the year from April 1, 2000 to March 31, 2001 (the 38th fiscal year).

Items to be voted on:

Proposal 1: Approval of the Appropriation of Retained Earnings for the 38th Fiscal Year

Considering this period's results and our shareholder-oriented policy, dividends per share at the end of this period shall be 19 yen (dividends for the full year including 19 yen interim dividends shall be 38 yen). As a result, the non-consolidated payout ratio shall be 21.5%, return on equity 11.4% and annual dividends to shareholder's equity 2.3%. Consolidated return on equity shall be 20.4%.

Proposal 2: Election of Two Statutory Auditors

Mr. Takanori Suzuki and Mr. Hiroshi Shiho will end their terms of office as Statutory Auditors as of the end of this Annual Shareholder's Meeting, so Mr. Takanori Suzuki shall be re-elected and Mr. Hiroshi Maeda shall be newly elected.

No.	Name	Present Post
1	Takanori Suzuki	Statutory auditor of Tokyo Electron Limited
2	Hiroshi Maeda	Attorney-at-law, "Mitsui, Yasuda, Wani & Maeda"

Note: Mr. Hiroshi Maeda is a candidate for outside auditor under Article 18, Section 1 of the Law Concerning Special Exceptions to the Commercial Code Relating to Article of Stock Corporation of Japan.
Proposal 3: Payment of Retirement Allowances for a Retiring Statutory Auditor
Retirement allowances shall be paid to a statutory auditor, Mr. Hiroshi Shiho, for services rendered during his terms after this Annual Shareholders' Meeting.
Proposal 4: Acquisition of the Company's Shares and Granting Stock Options
The Company shall repurchase as many as 215,600 shares for the amount of up to 3.1 billion yen to offer as many options to Corporate Directors and specific executives (Corporate Senior Staff) as a management incentive under Japanese Commercial Code and the Act on Special Measures for Industrial Revitalization.