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Mar 14, 2001

Change in the Corporate Organization and Important Personnel

1.Change in the Corporate Organization (Become effective on April 1, 2001)
1) Litho-Cell Group, Test & Integrated Process Control Group, Thin Film & Cleaning Group, Technology Development Group and Business Development & Account Management Group to be newly established.
2) IPC Dept. to be newly established within Test & Integrated Process Control Group.
3) Business Development & Account Management, Taiwan to be newly established within Business Development & Account Management Group.
4) Intellectual Property Dept. to be under the control of the Corporate Marketing.
5) Global IT Planning Dept. to be newly established.
6) Production & Procurement System Planning Dept. and GSO Project to be merged and Procurement Planning & System Dept. to be established.

(Reason of the Organization Change)
The Groups, that cover the function of more than single B.U. and corporate, has been formed to respond quickly and comprehensively to the market requirement, clarify and strengthen the corporate business.

2.Important Personnel Changes (Become effective on April 1, 2001)
*Tokyo Electron Yamanashi Ltd. and Tokyo Electron Miyagi Ltd. will be merged, and will start operation as a new company Tokyo Electron AT Ltd. from April 1, 2001.
Mitsuru Onozato (New) Executive Manager, C.S.S.,
Group General Manager, Litho-Cell Group
& B.U.G.M., Etch Systems B.U.
& Corporate Director, Tokyo Electron AT Ltd.
& Corporate Director, Tokyo Electron Kyushu Ltd.
(Now) C.S.S., B.U.G.M., Etch Systems B.U.
& Senior Vice President, Tokyo Electron Yamanashi Ltd.
Kousuke Ishii (New) Corporate Staff, C.S.S.
Group General Manager, Test & Integrated Process Control Group
& Corporate Director, Tokyo Electron AT Ltd.
(Now) Corporate Staff, C.S.S., Personnel Dept. & General Affairs Dept.
Global Operation-Corporate Administration
& Vice President, Personnel Dept.
Ryuichi Komatsubara (New) Corporate Staff, C.S.S.
Group General Manager, Thin Film & Cleaning Group
& Corporate Director, Tokyo Electron Tohoku Ltd.
& Corporate Director, Tokyo Electron AT Ltd.
& Corporate Director, Tokyo Electron Kyushu Ltd.
(Now) Corporate Staff, C.S.S.,
General Manager, Corporate Marketing
& Vice President, Corporate Marketing Dept.
Masao Kubodera (New) C.S.S., Group General Manager, Technology Development Group
& Executive Vice President, Tokyo Electron AT Ltd.
& Corporate Director, Tokyo Electron Tohoku Ltd.
& Corporate Director, Tokyo Electron Kyushu Ltd.
(Now) C.S.S., Single Wafer Deposition Systems/ Etch Systems Development
& President and Representative Director, Tokyo Electron Miyagi Ltd.
& Senior Vice President, Tokyo Electron Yamanashi Ltd.
Makoto Mizokuchi (New) Executive Manager, C.S.S., Group General Manager, Business Development & Account Management Group
(Now) Corporate Staff, C.S.S., General Manager, Business Development & Account Management, Japan
Kiyoshi Sunohara (New) Corporate Staff, C.S.S., General Manager, Business
Development & Account Management, North America & Europe
& Vice President, Business Development & Account Management, North America
& Senior Vice President, Tokyo Electron America, Inc.
(Now) Corporate Staff, C.S.S., General Manager, Business
Development & Account Management, North America & Europe
Hironobu Sato (New) Corporate Staff, C.S.S., General Manager, Business
Development & Account Management, Asia
& Vice President, Business Development & Account Management, Korea
& Vice President, Business Development & Account Management, China
(Now) Corporate Staff C.S.S., General Manager, Business
Development & Account Management, Asia
& Vice President, Business Development & Account Management, South-East Asia & China
Takaaki Matsuoka (New) Corporate Staff, C.S.S., General Manager, Corporate Marketing
& Vice President, Corporate Marketing Dept.
(Now) Corporate Staff, C.S.S., Corporate Technology Strategist/ Intellectual Property
Yuichi Honda (New) Executive Manager, C.S.S., Accounting Dept., Finance Dept. & Order Process Dept.
(Now) Executive Manager, C.S.S., Accounting Dept., Finance Dept., Order Process Dept. & Information Systems Dept.
& Vice President, Finance Dept.
Yoshichika Ando (New) Corporate Staff, Vice President, Global IT Planning Dept.
(Now) Corporate Staff, Information Systems
Yasuyuki Kuriki (New) Corporate Staff, C.S.S., B.U.G.M., Diffusion Systems B.U.
& Vice President, Diffusion Systems Dept.
(Now) Corporate Staff, C.S.S., B.U.G.M., Diffusion Systems B.U.
Yasuo Inoue (New) C.S.S., President and Representative Director, Tokyo Electron AT Ltd.
(Now) C.S.S., President and Representative Director, Tokyo Electron Yamanashi Ltd.
Yoshifumi Tahara (New) Corporate Director, Tokyo Electron AT Ltd.
(Now) Vice President, Etch Systems Engineering & Development, Tokyo Electron Yamanashi Ltd.
Takayoshi Ida (New) Corporate Staff, C.S.S., General Manager, Business
Development & Account Management, Japan
(Now) Corporate Staff, Business Development & Account Management, Japan
& General Manager, Osaka Branch Office
Takashi Nakamura (New) Corporate Staff, C.S.S., Personnel Dept., General Affairs Dept. & EHS
& Vice President, Personnel Dept.
(Now) Corporate Director, Tokyo Electron Yamanashi Ltd.
Chiaki Yamaguchi (New) Corporate Staff, General Manager, Business
Development & Account Management, Taiwan
(Now) Corporate Staff, Vice President, Business Development & Account Management, Asia (Taiwan)
Koichi Mori (New) Corporate Staff, Vice President, Business Development& Account Management, Asia (Singapore)
(Now) Corporate Staff, Corporate Development & Engineering
Takahiro Komatsu (New) Corporate Staff, Vice President, Business Development & Account Management, Japan (West Japan/ Kyushu)
& General Manager, Osaka Branch Office
& General Manager, Kyushu Branch Office
(Now) Corporate Staff, Vice President, Business Development
& Account Management, Japan (Kyushu)
& General Manager, Kyushu Branch Office
Hiroki Takebuchi (New) Deputy B.U.G.M., Etch Systems B.U.,
Corporate Director, Tokyo Electron AT Ltd.
(Now) Corporate Staff, Vice President, Clean Track Dept.
Keiichi Kawabata (New) Vice President, Clean Track Dept.
(Now) Senior Manager, Clean Track B.U.,
Clean Track B.U. Manager, Tokyo Electron America, Inc.
Kiyoshi Sato (New) Corporate Staff, Vice President, IPC Dept., Test & Integrated Process Control Group
(Now) Vice President, Business Development & Account
Management, North America & Europe (North America)
Yoshiaki Horii (New) Vice President, Business Development & Account Management, North America & Europe (Europe)
& Vice President, Tokyo Electron Europe Ltd.
(Now) Vice President, Diffusion Systems Dept.
Toshiya Matsuda (New) Vice President, Procurement Planning & System Dept.
(Now) Vice President, Production & Procurement System Planning Dept.
Yasushi Nakamura (New) Vice President, Finance Dept.
(Now) Senior Manager, Finance Dept.
Isamu Inuzuka (New) Vice President, Order Process Dept.
(Now) Vice President, Accounting Dept., Tokyo Electron Kyushu Ltd.
Keisuke Koizumi (New) Vice President, Information Systems Dept.
(Now) Vice President, Order Process Dept.
Shojiro Mori (New) Corporate Director, Tokyo Electron AT Ltd.
(Now) Vice President, Information Systems Dept.
Masamori Ozawa (New) Vice President, Osaka Administration Dept.
(Now) Vice President, Diffusion Systems Dept.
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