Tokyo Electron AT Limited
Development and manufacturing of plasma etch systems, single wafer CVD systems and FPD plasma etch/ash systems
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Yamanashi Plant (Fujii)
2381-1 Kitagejo, Fujii-cho
Nirasaki City, Yamanashi 407-8511
Tel: 0551-22-8611
Fax: 0551-23-2450
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Yamanashi Plant (Hosaka)
650 Mitsuzawa, Hosaka-cho
Nirasaki City, Yamanashi 407-0192
Tel: 0551-22-8611
Fax: 0551-23-4092
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Miyagi Plant
1-1 Nekohazama NemawariM
Matsushima-machi Miyagi-gun,
Miyagi 981-0203
Tel: 022-355-1500
Fax: 022-355-1501
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