The total CO2 emissions from the Tokyo Electron(TEL) value chain (including raw material procurement and product manufacture, transport, use, and disposal) was calculated according to the GHG Protocol.*1 Emissions arising from product use currently account for 90% of our total CO2 emissions. For this reason, we have made it a key corporate objective to promote environmentally friendly product design, and lower the energy consumption of our products, thereby reducing impact on the environment from product use. In fiscal 2015, we established a goal to reduce energy and pure water consumption by 10% by fiscal 2019, using fiscal 2014 consumption as the baseline. To achieve this goal, we are working to reduce energy use and improve overall throughput. In fiscal 2016, we reached this goal with the Triase+™ EX-II™ TiN Plus system. In fiscal 2017, we once again achieved the goal earlier than planned with the Precio™ XL wafer prober, the Certas LEAGA™ gas chemical etch system, and the CLEAN TRACK™ LITHIUS Pro™ Z coater/ developer. In addition, the percentage of sales from energy-saving models*2 increased in fiscal 2017 to 93.9% of total product sales.
To further reduce the overall environmental impact of our products, we must examine our primary equipment, peripherals, associated facilities, and management at our customers’ factories. Going forward, it will become increasingly important to improve the operational efficiency of our equipment and encourage overall energy-efficient operations at our customers’ factories. Therefore, we will continue to focus on monitoring and controlling our own energy use. We also plan to demonstrate the importance of energy saving measures through compliance with SEMI S23, the semiconductor industry standard for assessing energy conservation.
To meet our goals, we are promoting environmentally friendly manufacturing, development of new technologies, proactive measures to contain greenhouse gases, and further reductions in the use of energy, water, and chemicals.