
The Site of TEL's birth: The TBS Akasaka Office
| 1963/11 | Tokyo Electron Laboratories, Inc. established in Akasaka, Minato-ku, Tokyo with capital of five million yen as an affiliate of Tokyo Broadcasting System, Inc. |
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| 1968/2 | TEL-Thermco Engineering Co., Ltd. established as joint venture with Thermco Products Corp. of the U.S. |
High-pressure oxidation system
| 1970/6 | TEL-Thermco Engineering Co., Ltd. moves to Yokohama and produces wholly Japanese-made diffusion furnaces. |
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| 1975/10 | MEC Engineering Inc. and TEL Engineering Inc. merge to form TEL MEC, Inc. |
| 1977/11 | Pan Electron Inc. is acquired and absorbed. |
| 1978/10 | Tokyo Electron Laboratories, Inc. renamed Tokyo Electron Ltd. |
TEL is listed on second section of the Tokyo Stock Exchange
In-circuit board tester
| 1980/6 | Listed on the Second Section of the Tokyo Stock Exchange. |
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| 1983/7 | TEL-Lam Ltd. is established. |
| 1984/2 | Marged with TEL MEC Inc. |
| 3 | Listed on the First Section of the Tokyo Stock Exchange. |
| 1986/12 | TEL-Lam Ltd. purchased from Lam Research Corporation and turned into 100%-owned subsidiary. |
| 1988/1 | TEL-Thermco Engineering Co., Ltd. purchased from Thermco Products Corp, (U.S.) and turned into 100%-owned subsidiary. |
TEL receiving the Fourth Disclosure Award
| 1990/8 | TEL develops and markets LCD production equipment. |
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| 1994/8 | Headquarters are moved to TBS Building in Akasaka, Tokyo. |
| 1997/12 | Tokyo Electron Tohoku Ltd. Sagami Plant becomes the first in the TEL Group companies to acquire ISO 14001 certification. |
| 1998/2 | Shipments of the Vertical Diffusion Furnace reach 5,000 units. |
| 1999/1 | TEL receives Tokyo Stock Exchange's Fourth Annual Award for Excellence in Disclosure. |
| 10 | Company's business sector changed from "Wholesale" to "Electrical Equipment" on first section of Tokyo Stock Exchange. |
Trias SPA
Tokyo Electron Technology Development Institute, Inc.
| 2000/2 | Share trading unit is changed from 1,000 shares to 100 shares. |
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| 2001/4 | Tokyo Electron Yamanashi Ltd. and Tokyo Electron Miyagi Ltd. merge to form Tokyo Electron AT Ltd. |
| 2002/10 | Tokyo Electron Ltd. Advanced Software Engineering Dept. and Tokyo Electron Sapporo Ltd. merged to form Tokyo Electron Software Technologies Ltd. |
| 2004/4 | Tokyo Electron AT Ltd. and Tokyo Electron Tohoku Ltd. merged to form Tokyo Electron AT Ltd. |
| 7 | Tokyo Electron FE Ltd. and Tokyo Electron EE Ltd. merged to form Tokyo Electron FE Ltd. |
| 7 | Tokyo Electron U.S. Holdings, Inc. is established. |
| 2005/1 | TEL wins 10th Disclosure Award (the second time, including 1999). |
| 2006/2 | Tokyo Electron Korea Solution Ltd. is established. |
| 4 | Tokyo Electron AT Ltd. is split into Tokyo Electron AT Ltd., Tokyo Electron Tohoku Ltd., and Tokyo Electron TS Ltd. |
| 6 | TEL Venture Capital, Inc. is established. |
| 12 | TEL acquires Epion Corporation and changes its name to TEL Epion, Inc. |
| 2007/2 | Tokyo Electron PS Ltd. is established. |
| 6 | Tokyo Electron Technology Development Institute, Inc. is established. |
| 2008/2 | Tokyo Electron PV Ltd. is established. |
| 6 | Tokyo Electron India Private Ltd. is established. |
Tokyo Electron Miyagi Ltd.
A Ceremony for new plant in Kunshan, China
| 2010/7 | Tokyo Electron Miyagi Ltd. is established. |
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| 2011/1 | Tokyo Electron (Kunshan) Ltd. is established. |
| 4 | Tokyo Electron AT Ltd. renamed Toko Electron Yamanashi Ltd. |
| 4 | Tokyo Electron FE Ltd. and Toko Electron PS Ltd. marged to form Tokyo Electron FE Ltd. |
| 2012/4 | Tokyo Electron Singapore Pte. Ltd. is established. |
| 4 | Tokyo Electron Korea Ltd. and Toko Electron Korea Solution Ltd. marged to form Tokyo Electron Korea Ltd. |
| 5 | TEL acquires NEXX Systems, Inc. and changes its name to TEL NEXX, Inc. |
| 10 | TEL acquires FSI International, Inc. and established TEL FSI, Inc. |
| 11 | TEL acquires Oerlikon Solar and and established TEL Solar AG. |
| 12 | TEL acquires Magnetic Solutions Limited and established TEL Magnetic Solutions Limited. |
| 2013/4 | Merged with Tokyo Electron Technology Development Institute, Inc. and Tokyo Electron Software Technologies Limited. |
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